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ADXL001-500BEZ 数据表(PDF) 11 Page - Analog Devices |
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ADXL001-500BEZ 数据表(HTML) 11 Page - Analog Devices |
11 / 16 page ADXL001 Rev. A | Page 11 of 16 THEORY OF OPERATION DESIGN PRINCIPLES The ADXL001 accelerometer provides a fully differential sensor structure and circuit path for excellent resistance to EMI/RFI interference. This latest generation SOI MEMS device takes advantage of mechanically coupled but electrically isolated differential sensing cells. This improves sensor performance and size because a single proof mass generates the fully differential signal. The sensor signal conditioning also uses electrical feedback with zero-force feedback for improved accuracy and stability. This force feedback cancels out the electrostatic forces contributed by the sensor circuitry. Figure 19 is a simplified view of one of the differential sensor cell blocks. Each sensor block includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the device layer and movable plates attached to the sensor frame. Displacement of the sensor frame changes the differential capacitance. On-chip circuitry measures the capacitive change. MECHANICAL SENSOR The ADXL001 is built using the Analog Devices SOI MEMS sensor process. The sensor device is micromachined in-plane in the SOI device layer. Trench isolation is used to electrically isolate, but mechanically couple, the differential sensing elements. Single-crystal silicon springs suspend the structure over the handle wafer and provide resistance against acceleration forces. UNIT SENSING CELL MOVABLE FRAME FIXED PLATES UNIT FORCING CELL ANCHOR MOVING PLATE PLATE CAPACITORS ANCHOR Figure 19. Simplified View of Sensor Under Acceleration |
类似零件编号 - ADXL001-500BEZ |
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类似说明 - ADXL001-500BEZ |
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